시스템 사업본부

환경을 생각하는

Clean World High Technology

Air Floating Conveyor system

개요

System overall layout is according to the following schema
(please note that this figure is for illustration only and is not an exact drawing)

장비구성

장비사양

  • Handle 8th, 9th, 10th generation glass panel
  • High conveying speed (50 m/min+)
  • Minimize glass stress and potential damage
  • Minimize ESD
  • Compact buffering
  • Small footprint
  • Attractive initial and running cost